STS
STS / SPTS Plasma Etch Systems
Remanufactured equipment family listed in the company portfolio.
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Refurbished mask aligner sourcing and equipment support.
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Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.
| SUSS models | MA6 / MA8 / MA150 / MA200 (source shorthand MA6/8/150/200) |
|---|---|
| EVG models | EVG620 / EVG6200NT |
Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗
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