Services & technical support

Support across the process.

From selecting equipment to maintaining it and coordinating microfabrication, our services connect the steps around your application.

01

Equipment selection & sourcing

Find a system that fits the process, rather than selecting on model name alone. We support configuration discussions and sourcing of new and refurbished equipment.

  • Application and configuration review
  • New and refurbished equipment supply
  • Spare parts and consumables
Discuss this service ↗
02

Wafer robot support

Repair and refurbishment support for wafer-handling robots and related assemblies. Share the robot model, symptoms and maintenance history.

  • Repair, overhaul and refurbishment
  • Adjustment and functional evaluation
  • Parts and handling-system support
Discuss this service ↗
03

Precision parts processing

Application-specific quartz, ceramic, silicon carbide and silicon nitride components for semiconductor process equipment.

  • Material and drawing review
  • Precision component processing
  • Vacuum parts and component overhaul
Discuss this service ↗
04

Lithography process support

Direct-write, electron-beam and specialized lithography process support. We coordinate the service scope around your substrate and target pattern.

  • Direct-write process development
  • Laser micro- and nanofabrication
  • Partner-platform MEMS and microfabrication
Discuss this service ↗
Process collaboration

Specialist capabilities.
Connected through partners.

Microfabrication and MEMS services are coordinated with partner process platforms. We discuss the sample, process sequence, required equipment and acceptance criteria before confirming the work.

Partner capabilities and photographs are shown as collaboration references. Current process access and performance are confirmed for each project.

Discuss your process ↗
Partner process platform cleanroom reference photograph

Partner process platform

Reference photograph from the January 2022 partner-platform materials. Microfabrication services are provided through cooperation with partner facilities.

Tell us what your process needs.

Share your application, substrate and target specification.

Start an enquiry