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ZH Thin-Film Stress Tester

Measure thin-film stress on wafers from 100 mm to 300 mm.

2–4000 MPa
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Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.

Reference specifications
Sample sizes100 / 150 / 200 / 300 mm
LoadingManual / automatic
Measurement range2–4000 MPa
Repeatability1 MPa (sigma)

Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗

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