MANUFACTURER REFERENCEAMIES Overlay Metrology
AMIES / AMIES equipment

AMIES Overlay Metrology

Overlay Metrology for semiconductor and advanced packaging applications.

AMIES equipment
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Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.

Reference specifications
Stated measurement uncertainty0.25 nm

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