Wafer Robots and Load Ports

Wafer-transfer modules and related equipment support.

Wafer handling

Configuration & availability confirmed on enquiry

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Product information

Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.

Reference specifications
Wafer robots	3 / 4 axes
Load ports	6 / 8 / 12 inches

Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗