GM200A Automatic Reticle Pod Opener

Name: GM200A Automatic Reticle Pod Opener
Brand: Wuxi Lithography

Automatic opening of SMIF reticle pods with selectable RSP150 or RSP200 configuration.

220 V

Configuration & availability confirmed on enquiry

Select the pod configuration before ordering; RSP150 and RSP200 versions are not interchangeable.

Product information

Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.

Reference specifications
Dimensions	535 × 420 × 915 mm
Power	220 V
Pod compatibility	RSP200 OR RSP150; select one, not interchangeable
Torque detection	Stops automatically on abnormal opening/closing torque
Options	Obstacle/pinch protection; mask-protrusion detection; SECS/GEM remote control

Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗