Wuxi Lithography
GM200A Automatic Reticle Pod Opener
Automatic opening of SMIF reticle pods with selectable RSP150 or RSP200 configuration.
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F, I and Y reticle grippers for controlled mask handling.
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Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.
| 5009 / 6025 / 7015 | F, I and Y available |
|---|---|
| 9015 | F and I available; Y listed NA |
| ESD protection ring | Listed Y for all four sizes |
Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗
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