Wuxi Lithography
GM200A Automatic Reticle Pod Opener
Automatic opening of SMIF reticle pods with selectable RSP150 or RSP200 configuration.
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Manual SMIF reticle pod opening without an electrical supply.
Select the pod configuration before ordering; RSP150 and RSP200 versions are not interchangeable.
Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.
| Dimensions | 620 × 320 × 50 mm |
|---|---|
| Power | Not required |
| Pod compatibility | RSP200 OR RSP150; select one, not interchangeable |
| Pod lid placement area | Optional |
Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗
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