ZC Optoelectronics
NOVA-2000 SiC Wafer Inspection
Optical defect inspection for polished and epitaxial silicon carbide wafers.
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ZC Optoelectronics / Wafer inspection
AMMI-2000 Patterned Wafer Inspection
Patterned wafer inspection using bright-field, dark-field and differential interference imaging.
Configuration & availability confirmed on enquiry
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Product information
Reference specifications.
Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.
| Wafer sizes | 200 / 300 mm |
|---|---|
| Inspection | Bright field / dark field / differential interference |
| Resolution | 5–0.25 µm |
| Automation | 2 load ports |
Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗
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