ZC Optoelectronics
NOVA-2000-LN/LT Wafer Inspection
Defect inspection for lithium niobate and lithium tantalate substrates.
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ZC Optoelectronics / Wafer inspection
NOVA-2000 SiC Wafer Inspection
Optical defect inspection for polished and epitaxial silicon carbide wafers.
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Product information
Reference specifications.
Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.
| Wafer sizes | 4 / 6 / 8 inches |
|---|---|
| Substrates | Polished SiC substrates and homoepitaxial SiC |
| Throughput | 10 WPH at 6 inches |
| Automation | 2 load ports |
Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗
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