ZC Optoelectronics
NOVA-2000 SiC Wafer Inspection
Optical defect inspection for polished and epitaxial silicon carbide wafers.
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ZC Optoelectronics / Wafer inspection
NOVA-2000-LN/LT Wafer Inspection
Defect inspection for lithium niobate and lithium tantalate substrates.
Configuration & availability confirmed on enquiry
Share your application and target specification for product selection.
Product information
Reference specifications.
Confirm supported wafer sizes and throughput for your substrate and inspection recipe with our team. Manufacturer reference information; supply scope and configuration confirmed on enquiry.
| Substrates | LN / LT polished substrates, blackened, semi-blackened or transparent |
|---|---|
| Automation | 2 load ports |
Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗
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