ZC Optoelectronics
NOVA-2000 SiC Wafer Inspection
Optical defect inspection for polished and epitaxial silicon carbide wafers.
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ZC Optoelectronics / Wafer inspection
NOVA-2000-G Glass Wafer Inspection
Optical defect inspection for glass wafers.
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Product information
Reference specifications.
Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.
| Wafer sizes | 4 / 6 / 8 / 12 inches |
|---|---|
| Substrates | Glass and transparent/semitransparent substrates including optical-grade SiC |
| Resolution | 5–0.25 µm |
| Throughput | ≥20 WPH at 8 inches; ≥10 WPH at 12 inches, both at 0.5 µm |
| Automation | 2 load ports |
Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗
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