MOC CI-150 / CI-200 Automatic Mask Aligners

Name: MOC CI-150 / CI-200 Automatic Mask Aligners
Brand: MOC

Automatic mask alignment and exposure for 150 mm and 200 mm wafers.

6 / 8 inches

Configuration & availability confirmed on enquiry

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Product information

Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation.

Reference specifications
Wafer sizes	6 / 8 inches
Mask sizes	7 / 9 inches
Wavelength	365 / 405 nm UV LED
Light source	UV LED
Illumination	40 mW/cm²
Illumination uniformity	>95%
Effective exposure range	170 × 170 / 230 × 230 mm
Exposure modes	Hard contact / soft contact / proximity / vacuum contact
Exposure resolution	0.35 µm
Wafer thickness	0.4–1.6 mm
Alignment accuracy	≤±0.1 µm

Reference information: 2025-09. Final specifications are confirmed in the quotation. Ask a technical question ↗