WUXI LITHOGRAPHYEQUIPMENT · MATERIALS · PROCESSEnquiry
Home/Equipment/MSDI-3000 Unpatterned Wafer Inspection
MANUFACTURER REFERENCEMSDI-3000 Unpatterned Wafer Inspection
ZC Optoelectronics / Wafer inspection

MSDI-3000 Unpatterned Wafer Inspection

Optical wafer defect inspection. Specify wafer material, diameter and target defect size.

200 / 300 mm
Request information ↗
Configuration & availability confirmed on enquiry

Share your application and target specification for product selection.

Product information

Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.

Reference specifications
Wafer sizes200 / 300 mm
SensitivityBetter than 37 nm
Throughput≥60 WPH at 300 mm

Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗

Explore related products.

Tell us what your process needs.

Share your application, substrate and target specification.

Start an enquiry