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MANUFACTURER REFERENCEMSDI-5000 Unpatterned Wafer Inspection
ZC Optoelectronics / Wafer inspection

MSDI-5000 Unpatterned Wafer Inspection

Optical wafer defect inspection. Specify wafer material, diameter and target defect size.

300 mm
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Reference specifications.

Specifications are reference information; available configurations, performance and lead time are confirmed in your quotation. Manufacturer reference information; supply scope and configuration confirmed on enquiry.

Reference specifications
Wafer size300 mm
SensitivityBetter than 26 nm
Throughput≥67 WPH at 300 mm

Reference information: 2026-03. Final specifications are confirmed in the quotation. Ask a technical question ↗

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