YSD
LP3000 Direct-Write Lithography System
Laser direct writing for photomasks, wafers and microfabrication applications.
View productSemiconductor solutions · Wuxi, ChinaPrecision starts
Precision starts
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equipment.
Lithography, inspection and wafer handling — supported by materials, precision parts and process expertise.
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FROM PATTERN TO PROCESSWUXI LITHOGRAPHY
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Equipment & materials
WEM2000 Maskless Wafer Writer
Maskless exposure for research, prototyping and small-batch wafer processing.
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ZC Optoelectronics
NOVA-2000 SiC Wafer Inspection
Optical defect inspection for polished and epitaxial silicon carbide wafers.
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Nada
Nada 6–12 Inch Wafer Sorter
Configurable wafer handling with OCR, alignment and double-sided identification.
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More than a single tool.
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Direct-write lithography, mask aligners, wafer inspection and handling. New and refurbished equipment options.
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SOI and oxide wafers, optical substrates and precision quartz, ceramic, SiC and silicon nitride parts.
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